Organic light emitting diode display and method for manufacturing the same

ABSTRACT

An organic light emitting diode (OLED) display and a method for manufacturing the same are provided. The OLED display includes a substrate, an active layer and a capacitor lower electrode positioned on the substrate, a gate insulating layer positioned on the active layer and the capacitor lower electrode, a gate electrode positioned on the gate insulating layer at a location corresponding to the active layer, a capacitor upper electrode positioned on the gate insulating layer at a location corresponding to the capacitor lower electrode, a first electrode positioned to be separated from the gate electrode and the capacitor upper electrode, an interlayer insulating layer positioned on the gate electrode, the capacitor upper electrode, and the first electrode, a source electrode and a drain electrode positioned on the interlayer insulating layer, and a bank layer positioned on the source and drain electrodes.

This application is a Divisional of co-pending U.S. application Ser. No.13/969,236 filed Aug. 16, 2013, which is a Continuation of U.S.application Ser. No. 13/236,225 filed Sep. 19, 2011, now U.S. Pat. No.8,535,975, which claims priority to and the benefit of Korean PatentApplication Nos. 10-2010-0092419 and 10-2010-0092420 filed on Sep. 20,2010. The entire contents of all the above applications are incorporatedherein by reference for all purposes in its entirety.

BACKGROUND OF THE INVENTION

1. Field of the Invention

Embodiments of the invention relate to an organic light emitting diode(OLED) display and a method for manufacturing the same.

2. Discussion of the Related Art

The importance of flat panel displays has recently increased with thegrowth of multimedia technologies. Various flat panel displays such asliquid crystal displays (LCDs), plasma display panels (PDPs), fieldemission displays (FEDs), and organic light emitting diode (OLED)displays have been put to practical use.

Among the flat panel displays, the liquid crystal display has bettervisibility and lower power consumption than a cathode ray tube. On theother hand, the OLED display has a fast response time equal to or lessthan about 1 ms, low power consumption, and a wide viewing angle. Thus,the OLED display having a self-emitting structure has been considered asa next generation display.

FIG. 1 illustrates a related art OLED display.

As shown in FIG. 1, a buffer layer 110 is positioned on a substrate 100,an active layer 115 a and a capacitor lower electrode 115 b arepositioned on the buffer layer 110, and a gate insulating layer 120 forinsulating the active layer 115 a and the capacitor lower electrode 115b is positioned on the active layer 115 a and the capacitor lowerelectrode 115 b. A gate electrode 130 a and a capacitor upper electrode130 b are positioned on the gate insulating layer 120, and an interlayerinsulating layer 135 for insulating the gate electrode 130 a and thecapacitor upper electrode 130 b is positioned on the gate electrode 130a and the capacitor upper electrode 130 b. A source electrode 145 a anda drain electrode 145 b connected to the active layer 115 a throughcontact holes 140 a and 140 b are positioned on the interlayerinsulating layer 135, thereby constituting a thin film transistor (TFT).

A passivation layer 150 and a first electrode 160, which is connected tothe drain electrode 145 b through a via hole 155, are positioned on theTFT. A bank layer 165 including an opening 170 exposing the firstelectrode 160 is positioned on the substrate 100, and an organic layer175 is positioned on the first electrode 160. A spacer 180 is positionedaround the organic layer 175, and a second electrode 185 is positionedon the substrate 100. In this way, the OLED display having theabove-described configuration is formed.

The related art OLED display may be manufactured using a total of ninemasks for forming the active layer 115 a, the capacitor lower electrode115 b, the gate electrode 130 a, the contact holes 140 a and 140 b, thesource electrode 145 a, the drain electrode 145 b, the via hole 155, thefirst electrode 160, the opening 170, and the spacer 180.

However, because the related art OLED display is manufactured using thenine masks through a large number of processes, the manufacturing costis high and the productivity is low.

SUMMARY OF THE INVENTION

Embodiments of the invention provide an organic light emitting diode(OLED) display and a method for manufacturing the same capable ofreducing the number of masks and the manufacturing cost and increasingthe productivity and the manufacturing yield.

In one aspect, there is an OLED display including a substrate, an activelayer and a capacitor lower electrode, which are positioned on thesubstrate to be separated from each other, a gate insulating layerpositioned on the active layer and the capacitor lower electrode, a gateelectrode positioned on the gate insulating layer at a locationcorresponding to the active layer, a capacitor upper electrodepositioned on the gate insulating layer at a location corresponding tothe capacitor lower electrode, a first electrode positioned to beseparated from the gate electrode and the capacitor upper electrode, aninterlayer insulating layer positioned on the gate electrode, thecapacitor upper electrode, and the first electrode, a source electrodeand a drain electrode, which are positioned on the interlayer insulatinglayer and connected to the active layer, one of the source electrode andthe drain electrode being connected to the first electrode, a bank layerpositioned on the source electrode and the drain electrode, the banklayer exposing a portion of the first electrode, a spacer positioned onthe bank layer, an organic layer positioned on the exposed portion ofthe first electrode, and a second electrode positioned on the organiclayer.

In another aspect, there is an OLED display including a substrate, anactive layer and a silicon pattern positioned on the substrate, a firstinsulating pattern positioned on the active layer and a secondinsulating pattern positioned on the silicon pattern, a capacitor lowerelectrode positioned on the second insulating pattern, a gate insulatinglayer positioned on the first insulating pattern and the capacitor lowerelectrode, a gate electrode positioned on the gate insulating layer at alocation corresponding to the active layer, a capacitor upper electrodepositioned on the gate insulating layer at a location corresponding tothe capacitor lower electrode, a first electrode positioned to beseparated from the gate electrode and the capacitor upper electrode, aninterlayer insulating layer positioned on the gate electrode, thecapacitor upper electrode, and the first electrode, a source electrodeand a drain electrode, which are positioned on the interlayer insulatinglayer and connected to the active layer, one of the source electrode andthe drain electrode being connected to the first electrode, a bank layerpositioned on the source electrode and the drain electrode, the banklayer exposing a portion of the first electrode, a spacer positioned onthe bank layer, an organic layer positioned on the exposed portion ofthe first electrode, and a second electrode positioned on the organiclayer.

BRIEF DESCRIPTION OF THE DRAWINGS

The accompanying drawings, which are included to provide a furtherunderstanding of the invention and are incorporated in and constitute apart of this specification, illustrate embodiments of the invention andtogether with the description serve to explain the principles of theinvention. In the drawings:

FIG. 1 illustrates a related art organic light emitting diode (OLED)display;

FIG. 2 is a cross-sectional view of an OLED display according to a firstembodiment of the invention;

FIGS. 3A to 3K are cross-sectional views sequentially illustratingstages in a method for manufacturing an OLED display according to afirst embodiment of the invention;

FIG. 4 is a cross-sectional view of an OLED display according to asecond embodiment of the invention; and

FIGS. 5A to 5J are cross-sectional views sequentially illustratingstages in a method for manufacturing an OLED display according to asecond embodiment of the invention.

DETAILED DESCRIPTION OF THE EMBODIMENTS

Reference will now be made in detail to the specific embodiments of theinvention, examples of which are illustrated in the accompanyingdrawings. Wherever possible, the same reference numbers will be usedthroughout the drawings to refer to the same or like parts. Detaileddescription of known arts will be omitted to avoid obscuring theinvention.

In the drawings, the thickness of layers, films, panels, regions, etc.,are exaggerated for clarity. It will be understood that when an elementsuch as a layer, film, region, or substrate is referred to as being “on”another element, it can be directly on the other element or interveningelements may also be present. In contrast, when an element is referredto as being “directly on” another element, there are no interveningelements present. Further, it will be understood that when an elementsuch as a layer, film, region, or substrate is referred to as being“entirely” on another element, it may be on the entire surface of theother element and may not be on a portion of an edge of the otherelement.

FIG. 2 is a cross-sectional view of an organic light emitting diode(OLED) display according to a first embodiment of the invention.

As shown in FIG. 2, in an OLED display 200 according to a firstembodiment of the invention, a buffer layer 215 is positioned on asubstrate 210, and an active layer 220 a and a capacitor lower electrode220 b are positioned on the buffer layer 215. The active layer 220 a isdoped with impurities and thus includes a source region 221 and a drainregion 222. The capacitor lower electrode 220 b is doped withimpurities.

A gate insulating layer 225 is positioned on the active layer 220 a andthe capacitor lower electrode 220 b. A gate electrode 230 a and acapacitor upper electrode 230 b are positioned on the gate insulatinglayer 225. The gate electrode 230 a is positioned at a locationcorresponding to the active layer 220 a, and the capacitor upperelectrode 230 b is positioned at a location corresponding to thecapacitor lower electrode 220 b. The gate electrode 230 a may have atwo-layered structure of a stack of a metal oxide pattern (a metal oxidematerial) 231 and a metal pattern (a metal material) 232. A firstelectrode 230 c is positioned to be separated from the gate electrode230 a and the capacitor upper electrode 230 b. The first electrode 230 cis positioned on the gate insulating layer 225.

An interlayer insulating layer 235 is positioned on the gate electrode230 a, the capacitor upper electrode 230 b, and the first electrode 230c. A contact hole 240 exposing the source region 221 and the drainregion 222 of the active layer 220 a and an opening 241 exposing thefirst electrode 230 c are formed in the interlayer insulating layer 235.

A source electrode 245 a and a drain electrode 245 b are positioned onthe interlayer insulating layer 235. The source electrode 245 a and thedrain electrode 245 b respectively contact the source region 221 and thedrain region 222 of the active layer 220 a, and the drain electrode 245b contacts the first electrode 230 c.

A bank layer 250 and a spacer 260 are positioned on the substrate 210,on which the source electrode 245 a and the drain electrode 245 b areformed. An opening 255 exposing the first electrode 230 c is formed inthe bank layer 250. The spacer 260 protrudes further than the surface ofthe bank layer 250 and forms an integral body along with the bank layer250. Further, the spacer 260 is positioned around (or at the peripheryof) the exposed first electrode 230 c.

An organic layer 265 is positioned on the exposed first electrode 230 c.A portion of the organic layer 265 is positioned on a lateral surface ofthe bank layer 250 at the opening 255. The organic layer 265 may includea light emitting layer and at least one of a hole injection layer, ahole transport layer, an electron transport layer, and an electroninjection layer. A second electrode 270 is positioned on the substrate210 including the organic layer 265. In this way, the OLED display 200according to the first embodiment of the invention may be configured.

FIGS. 3A to 3K are cross-sectional views sequentially illustratingstages in a method for manufacturing an OLED display according to afirst embodiment of the invention.

As shown in FIG. 3A, a buffer layer 315 is formed on a substrate 310formed of glass, plastic, or a conductive material. The buffer layer 315prevents impurities existing at the surface of the substrate 310 frombeing gushed or released in a subsequent laser crystallization processof an amorphous silicon layer and prevents the impurities from beingdispersed into the amorphous silicon layer. The buffer layer 315 may beformed using silicon oxide (SiOx), silicon nitride (SiNx), or a stackthereof. Other materials may be used for the buffer layer 315.

An amorphous silicon layer 317 is deposited on the buffer layer 315.Subsequently, a laser crystallization process for irradiating a laseronto the amorphous silicon layer 317 is performed. The lasercrystallization process may be performed through an excimer laserannealing (ELA) method. Thus, the amorphous silicon layer 317 iscrystallized to form a polycrystalline silicon layer.

Next, as shown in FIG. 3B, the polycrystalline silicon layer ispatterned using a first mask to form an active layer 320 a and acapacitor lower electrode 320 b.

Next, as shown in FIG. 3C, a gate insulating layer 325 is formed on thesubstrate 310 including the active layer 320 a and the capacitor lowerelectrode 320 b. The gate insulating layer 325 may be formed usingsilicon oxide (SiOx), silicon nitride (SiNx), or a stack thereof. Othermaterials may be used for the gate insulating layer 325.

Subsequently, a metal oxide layer 330 and a metal layer 335 aresequentially stacked on the gate insulating layer 325. The metal oxidelayer 330 may be formed of indium tin oxide (ITO), indium zinc oxide(IZO), or indium tin zinc oxide (ITZO). The metal layer 335 may be asingle layer formed of aluminum (Al), molybdenum (Mo), tungsten (W),titanium (Ti), or an alloy thereof, or a multilayer formed of Mo/Al/Moor Ti/Al/Ti. Other metal materials may be used for the metal layer 335.

Next, a first photosensitive layer 340 is coated on the substrate 310including the metal oxide layer 330 and the metal layer 335 using a spincoating method, etc. The first photosensitive layer 340 may be apositive photoresist. Thus, when light is incident on the firstphotosensitive layer 340, the first photosensitive layer 340 may be amaterial which is subsequently decomposed and removed.

Subsequently, a first halftone mask 350 including a penetrable part 351,a semipenetrable part 352, and a block part 353, is aligned on thesubstrate 310, on which the first photosensitive layer 340 is formed.Ultraviolet light is then irradiated onto the first halftone mask 350.

Next, as shown in FIG. 3D, a first photosensitive pattern 355 and asecond photosensitive pattern 356 are developed using a diffractionexposure technique with the first halftone mask 350 to form the firstphotosensitive pattern 355 and the second photosensitive pattern 356each having a different thickness.

More specifically, the diffraction exposure technique is applied to thefirst halftone mask 350 including the penetrable part 351, thesemipenetrable part 352, and the block part 353. Hence, a portion of thefirst photosensitive layer 340 opposite the block part 353 is notremoved and remains to form the first photosensitive pattern 355.Further, a portion of the first photosensitive layer 340 opposite thesemipenetrable part 352 is diffracted to form the second photosensitivepattern 356 having a thickness equal to or less than about ½ of athickness of the first photosensitive pattern 355 by light transmittedby the semipenetrable part 352. Further, a portion of the firstphotosensitive layer 340 opposite the penetrable part 351 is developed,decomposed, and completely removed. Hence, the surface of the metallayer 335 is exposed.

The first photosensitive pattern 355 is formed in an area where a gateelectrode will be subsequently formed. The second photosensitive pattern356 is formed in an area where a capacitor upper electrode and a firstelectrode will be subsequently formed.

Next, as shown in FIG. 3E, the metal oxide layer 330 and the metal layer335 are etched using the first photosensitive pattern 355 and the secondphotosensitive pattern 356 to form a metal oxide pattern and a metalpattern. Subsequently, an ashing process is performed to remove thesecond photosensitive pattern 356 and to reduce the thickness of thefirst photosensitive pattern 355 by the removed thickness of the secondphotosensitive pattern 356.

Subsequently, only the metal layer 335 in a removal area of the secondphotosensitive pattern 356 is etched using an etchant capable of etchingnot the metal oxide layer 330 but the metal layer 335 to form acapacitor upper electrode 365 and a first electrode 367.

The first photosensitive pattern 355 remaining on the substrate 310 isstripped and removed. Hence, as shown in FIG. 3F, a gate electrode 360is formed.

Thus, as shown in FIG. 3F, the gate electrode 360 having a stack of ametal oxide pattern (a metal oxide material) 361 and a metal pattern (ametal material) 362 is formed on the gate insulating layer 325. Thecapacitor upper electrode 365 and the first electrode 367 each includingonly the metal oxide pattern 361 are formed.

Subsequently, the substrate 310 is doped with impurities. In thisinstance, both sides of the active layer 320 a are doped with impuritiesusing the gate electrode 360 as a mask. Thus, a source region 321 and adrain region 322 of the active layer 320 a are formed. Further, thecapacitor upper electrode 365 and the capacitor lower electrode 320 bare doped with impurities.

Next, as shown in FIG. 3G an interlayer insulating layer 370 is formedon the substrate 310 doped with the impurities. The interlayerinsulating layer 370 may be formed using silicon oxide (SiOx), siliconnitride (SiNx), or a stack thereof. Other materials may be used for theinterlayer insulating layer 370.

Subsequently, the interlayer insulating layer 370 is patterned using asecond mask to form a contact hole 375 exposing the source region 321and the drain region 322 of the active layer 320 a and to form anopening 376 exposing the first electrode 370.

Next, as shown in FIG. 3H, a conductive layer is deposited on thesubstrate 310 and is patterned using a third mask to form a sourceelectrode 380 a and a drain electrode 380 b. In this instance, thesource electrode 380 a and the drain electrode 380 b contact the sourceregion 321 and the drain region 322 of the active layer 320 a throughthe contact hole 375, respectively. Further, the drain electrode 380 bcontacts the first electrode 367.

Each of the source electrode 380 a and the drain electrode 380 b may bea single layer formed of aluminum (Al), molybdenum (Mo), tungsten (W),titanium (Ti), or an alloy thereof. Alternatively, each of the sourceelectrode 380 a and the drain electrode 380 b may be a multilayer formedof Mo/Al/Mo or Ti/Al/Ti. Other metal materials may be used for the eachof the source electrode 380 a and the drain electrode 380 b.

Subsequently, a second photosensitive layer 390 is coated on thesubstrate 310 including the source electrode 380 a and the drainelectrode 380 b using the spin coating method, etc. The secondphotosensitive layer 390 may be formed of the same material as the firstphotosensitive layer 340.

Subsequently, a second halftone mask 380 including a penetrable part381, a semipenetrable part 382, and a block part 383 is aligned on thesubstrate 310, on which the second photosensitive layer 390 is formed.Ultraviolet light is then irradiated onto the second halftone mask 380.In this instance, the block part 383 is aligned in an area to form aspacer, the semipenetrable part 382 is aligned in an area to form a banklayer, and the penetrable part 381 is aligned in a formation area of thefirst electrode 367.

Next, as shown in FIG. 3I, the second photosensitive layer 390 isdeveloped using the diffraction exposure technique to form a bank layer391 and a spacer 392.

More specifically, the diffraction exposure technique is applied to thesecond halftone mask 380 including the penetrable part 381, thesemipenetrable part 382, and the block part 383. Hence, a portion of thesecond photosensitive layer 390 opposite the block part 383 is notremoved and remains to form the spacer 392. Further, a portion of thesecond photosensitive layer 390 opposite the semipenetrable part 382 isdiffracted to form the bank layer 391 having a thickness less than thespacer 392 (such as a thickness equal to or less than about ½ of athickness of the spacer 392) by light transmitted by the semipenetrablepart 382. Further, a portion of the second photosensitive layer 390opposite the penetrable part 381 is developed, decomposed, andcompletely removed to form an opening 393 exposing the surface of thefirst electrode 367.

As a result, as shown in FIG. 3I, the bank layer 391 and the spacer 392are simultaneously formed and may form an integral body.

Next, the substrate 310, on which the bank layer 391 and the spacer 392are formed, is placed inside a vacuum chamber, and a shadow mask 394 isaligned on the substrate 310. In this instance, the shadow mask 394 isaligned on the spacer 392.

As shown in FIG. 3J, an organic material is deposited on the substrate310 to form an organic layer 395 on the first electrode 367. The organiclayer 395 may include a light emitting layer and at least one of a holeinjection layer, a hole transport layer, an electron transport layer,and an electron injection layer.

Next, as shown in FIG. 3K, a metal material is deposited on thesubstrate 310 to form a second electrode 396. The second electrode 396may be formed of magnesium (Mg), silver (Ag), aluminum (Al), calcium(Ca), or an alloy thereof having a low line resistance and a low workfunction. Other metal materials may be used for the second electrode396.

In this way, the OLED display according to the first embodiment of theinvention is manufactured.

As described above, the OLED display according to the first embodimentof the invention may be manufactured using a total of five masksincluding the first to third masks and the first and second halftonemasks, as compared the related art OLED display manufactured using atotal of nine masks. Accordingly, the OLED display according to thefirst embodiment of the invention may reduce use of four masks ascompared the related art OLED display. As a result, the manufacturingcost may be reduced, and the productivity and the manufacturing yieldmay be improved.

FIG. 4 is a cross-sectional view of an OLED display according to asecond embodiment of the invention.

As shown in FIG. 4, in an OLED display 500 according to a secondembodiment of the invention, a buffer layer 515 is positioned on asubstrate 510, and an active layer 520 a and a silicon pattern 520 b arepositioned on the buffer layer 515. The active layer 520 a is doped withimpurities and thus includes a source region 521 and a drain region 522.

A first insulating pattern 523 a is positioned on the active layer 520a, and a second insulating pattern 523 b is positioned on the siliconpattern 520 b. A capacitor lower electrode 526 is positioned on thesecond insulating pattern 523 b.

A gate insulating layer 530 is positioned on the first insulatingpattern 523 a and the capacitor lower electrode 526. A gate electrode535 a and a capacitor upper electrode 535 b are positioned on the gateinsulating layer 530. The gate electrode 535 a is positioned at alocation corresponding to the active layer 520 a, and the capacitorupper electrode 535 b is positioned at a location corresponding to thecapacitor lower electrode 526. The gate electrode 535 a may have atwo-layered structure of a stack of a first metal oxide pattern (a firstmetal oxide material) 531 and a first metal pattern (a first metalmaterial) 532. The capacitor upper electrode 535 b may have atwo-layered structure of a stack of a second metal oxide pattern (asecond metal oxide material) 536 and a second metal pattern (secondmetal material) 537.

A first electrode 535 c is positioned to be separated from the gateelectrode 535 a and the capacitor upper electrode 535 b. The firstelectrode 535 c may have a two-layered structure of a stack of a thirdmetal oxide pattern (a third metal oxide material) 538, and a thirdmetal pattern (a third metal material) 539 positioned at one edge of thethird metal oxide pattern 538.

An interlayer insulating layer 540 is positioned on the gate electrode535 a, the capacitor upper electrode 535 b, and the first electrode 535c.

The interlayer insulating layer 540 includes a contact hole 541 exposingthe source region 521 and the drain region 522 of the active layer 520 aand an opening 542 exposing the first electrode 535 c.

A source electrode 545 a and a drain electrode 545 b are positioned onthe interlayer insulating layer 540. The source electrode 545 a and thedrain electrode 545 b respectively contact the source region 521 and thedrain region 522 of the active layer 520 a, and the drain electrode 545b contacts the first electrode 535 c.

A bank layer 550 and a spacer 557 are positioned on the substrate 510,on which the source electrode 545 a and the drain electrode 545 b areformed. The bank layer 550 includes an opening 555 exposing the firstelectrode 535 c. The spacer 557 protrudes further than the surface ofthe bank layer 550 and forms an integral body along with the bank layer550. Further, the spacer 557 is positioned around the exposed firstelectrode 535 c.

An organic layer 560 is positioned on the exposed first electrode 535 c.A portion of the organic layer 560 is positioned on a lateral surface ofthe bank layer 550 at the opening 555. The organic layer 560 may includea light emitting layer and at least one of a hole injection layer, ahole transport layer, an electron transport layer, and an electroninjection layer. A second electrode 570 is positioned on the substrate510 including the organic layer 560. In this way, the OLED display 500according to the second embodiment of the invention is formed.

FIGS. 5A to 5J are cross-sectional views sequentially illustrating eachof stages in a method for manufacturing an OLED display according to asecond embodiment of the invention.

As shown in FIG. 5A, a buffer layer 615 is formed on a substrate 610formed of glass, plastic, or a conductive material. The buffer layer 615prevents impurities existing at the surface of the substrate 610 frombeing gushed or released in a subsequent laser crystallization processof an amorphous silicon layer and prevents the impurities from beingdispersed into the amorphous silicon layer. The buffer layer 615 may beformed using silicon oxide (SiOx), silicon nitride (SiNx), or a stackthereof. Other materials may be used for the buffer layer 615.

An amorphous silicon layer 620 a is deposited on the buffer layer 615.Subsequently, a laser crystallization process for irradiating a laseronto the amorphous silicon layer 620 a is performed. The lasercrystallization process may be performed through an excimer laserannealing (ELA) method. Thus, the amorphous silicon layer 620 a iscrystallized to form a polycrystalline silicon layer 620 b.

Next, as shown in FIG. 5B, a first insulating layer 625 is stacked onthe polycrystalline silicon layer 620 b, and a first metal layer 630 isstacked on the first insulating layer 625. The first insulating layer625 may be formed of silicon oxide (SiOx) or silicon nitride (SiNx), andthe first metal layer 630 may be formed of aluminum (Al), molybdenum(Mo), tungsten (W), titanium (Ti), or an alloy thereof. Other materialsmay be used for the first insulating layer 625, and other metalmaterials may be used for the first metal layer 630.

Next, a first photosensitive layer 635 is coated on the substrate 610including the first insulating layer 625 and the first metal layer 630using a spin coating method, etc. The first photosensitive layer 635 maybe a positive photoresist. Thus, when light is incident on the firstphotosensitive layer 635, the first photosensitive layer 635 may be amaterial which is subsequently decomposed and removed.

Subsequently, a first halftone mask 640 including a penetrable part 641,a semipenetrable part 642, and a block part 643 is aligned on thesubstrate 610, on which the first photosensitive layer 635 is formed.Ultraviolet light is then irradiated onto the first halftone mask 640.

Next, as shown in FIG. 5C, the first halftone mask 640 is developedusing a diffraction exposure technique to form a first photosensitivepattern 645 and a second photosensitive pattern 646 each having adifferent thickness.

More specifically, the diffraction exposure technique is applied to thefirst halftone mask 640 including the penetrable part 641, thesemipenetrable part 642, and the block part 643. Hence, a portion of thefirst photosensitive layer 635 opposite the block part 643 is notremoved and remains to form the first photosensitive pattern 645.Further, a portion of the first photosensitive layer 635 opposite thesemipenetrable part 642 is diffracted to form the second photosensitivepattern 646 having a thickness equal to or less than about ½ of athickness of the first photosensitive pattern 645 by light transmittedby the semipenetrable part 642. Further, a portion of the firstphotosensitive layer 635 opposite the penetrable part 641 is developed,decomposed, and completely removed. Hence, the surface of the metallayer 630 is exposed.

The first photosensitive pattern 645 is formed in an area where acapacitor lower electrode will be subsequently formed. The secondphotosensitive pattern 646 is formed in an area where an active layerwill be subsequently formed.

Next, as shown in FIG. 5D, the polycrystalline silicon layer 620 b, thefirst insulating layer 625, and the first metal layer 630 are etchedusing the first photosensitive pattern 645 and the second photosensitivepattern 646 to form an active layer 651 a, a first insulating pattern652 a on the active layer 651 a, a first metal pattern 653 a on thefirst insulating pattern 652 a, a silicon pattern 651 b, a secondinsulating pattern 652 b on the silicon pattern 651 b, and a capacitorlower electrode 653 b on the second insulating pattern 652 b.

Subsequently, an aching process is performed to remove the secondphotosensitive pattern 646 and to reduce the thickness of the firstphotosensitive pattern 645 by the removed thickness of the secondphotosensitive pattern 646.

Next, as shown in FIG. 5E, the first metal pattern 653 a in a removalarea of the second photosensitive pattern 646 is etched using an etchantand is removed. The first photosensitive pattern 645 remaining on thesubstrate 610 is stripped and removed.

Thus, the active layer 651 a is formed on the buffer layer 615, thefirst insulating pattern 652 a is formed on the active layer 651 a, thesilicon pattern 651 b is formed on the buffer layer 615, the secondinsulating pattern 652 b is formed on the silicon pattern 651 b, and thecapacitor lower electrode 653 b is formed on the second insulatingpattern 652 b.

Next, as shown in FIG. 5F, a gate insulating layer 660 is formed on thesubstrate 610. The gate insulating layer 660 may be formed using siliconoxide (SiOx), silicon nitride (SiNx), or a stack thereof. Othermaterials may be used for the gate insulating layer 660.

Subsequently, a metal oxide layer and a second metal layer aresequentially stacked on the gate insulating layer 660 and are patternedusing a first mask to form a gate electrode 670 a, a capacitor upperelectrode 670 b, and a first electrode 670 c.

The metal oxide layer may be formed of indium tin oxide (ITO), indiumzinc oxide (IZO), or indium tin zinc oxide (ITZO). The second metallayer may be a single layer formed of aluminum (Al), molybdenum (Mo),tungsten (W), titanium (Ti), or an alloy thereof, or a multilayer formedof Mo/Al/Mo or Ti/Al/Ti. Other materials may be used for the metal oxidelayer. Also, other metal materials may be used for the second metallayer.

Thus, the gate electrode 670 a has a stack of a first metal oxidepattern (a first metal oxide pattern) 671 and a second metal pattern (asecond metal material) 672, the capacitor upper electrode 670 b has astack of a second metal oxide pattern (a second metal oxide material)673 and a third metal pattern (a third metal material) 674, and thefirst electrode 670 c has a stack of a third metal oxide pattern (athird metal oxide material) 675 and a fourth metal pattern (a fourthmetal material) 676.

Subsequently, the substrate 610 is doped with impurities. In thisinstance, both sides of the active layer 651 a are doped with impuritiesusing the gate electrode 670 a as a mask. Thus, a source region 656 anda drain region 657 of the active layer 651 a are formed.

Next, as shown in FIG. 5G an interlayer insulating layer 680 is formedon the substrate 610 doped with the impurities. The interlayerinsulating layer 680 may be formed using silicon oxide (SiOx), siliconnitride (SiNx), or a stack thereof. Other materials may be used for theinterlayer insulating layer 680.

Subsequently, the interlayer insulating layer 680 is patterned using asecond mask to form a contact hole 681 exposing the source region 656and the drain region 657 of the active layer 651 a and to form anopening 682 exposing the first electrode 670 c.

Next, as shown in FIG. 5H, a conductive layer is deposited on thesubstrate 610 and is patterned using a third mask to form a sourceelectrode 685 a and a drain electrode 685 b. In this instance, thesource electrode 685 a and the drain electrode 685 b contact the sourceregion 656 and the drain region 657 of the active layer 651 a throughthe contact hole 681, respectively. Further, the drain electrode 685 bcontacts the first electrode 670 c.

In the patterning process of the conductive layer using the third mask,the fourth metal pattern 676 of the first electrode 670 c is patternedand is positioned only at one edge of the third metal oxide pattern 675.Further, the drain electrode 685 b contacts the fourth metal pattern 676of the first electrode 670 c.

Each of the source electrode 685 a and the drain electrode 685 b may bea single layer formed of aluminum (Al), molybdenum (Mo), tungsten (W),titanium (Ti), or an alloy thereof. Alternatively, each of the sourceelectrode 685 a and the drain electrode 685 b may be a multilayer formedof Mo/Al/Mo or Ti/Al/Ti. Other metal materials may be used for the eachof the source electrode 685 a and the drain electrode 685 b.

Subsequently, a second photosensitive layer 700 is coated on thesubstrate 610 including the source electrode 685 a and the drainelectrode 685 b using the spin coating method, etc. The secondphotosensitive layer 700 may be formed of the same material as the firstphotosensitive layer 635.

Subsequently, a second halftone mask 690 including a penetrable part691, a semipenetrable part 692, and a block part 693 is aligned on thesubstrate 610, on which the second photosensitive layer 700 is formed.Ultraviolet light is then irradiated onto the second halftone mask 690.In this instance, the block part 693 is aligned in an area to form aspacer, the semipenetrable part 692 is aligned in an area to form a banklayer, and the penetrable part 691 is aligned in a formation area of thefirst electrode 670 c.

Next, as shown in FIG. 5I, the second halftone mask 690 is developedusing the diffraction exposure technique to form a bank layer 710 and aspacer 715.

More specifically, the diffraction exposure technique is applied to thesecond halftone mask 690 including the penetrable part 691, thesemipenetrable part 692, and the block part 693. Hence, a portion of thesecond photosensitive layer 700 opposite the block part 693 is notremoved and remains to form the spacer 715. Further, a portion of thesecond photosensitive layer 700 opposite the semipenetrable part 692 isdiffracted to form the bank layer 710 having a thickness less than thespacer 715 (such as a thickness equal to or less than about ½ of athickness of the spacer 715) by light transmitted by the semipenetrablepart 692. Further, a portion of the second photosensitive layer 700opposite the penetrable part 691 is developed, decomposed, andcompletely removed to form an opening 717 exposing the surface of thefirst electrode 670 c.

As a result, as shown in FIG. 5I, the bank layer 710 and the spacer 715are simultaneously formed and may form an integral body.

Next, the substrate 610, on which the bank layer 710 and the spacer 715are formed, is placed inside a vacuum chamber, and a shadow mask 720 isaligned on the substrate 610. In this instance, the shadow mask 720 isaligned on the spacer 715.

As shown in FIG. 5J, an organic material is deposited on the substrate610 to form an organic layer 730 on the first electrode 670 c. Theorganic layer 730 may include a light emitting layer and at least one ofa hole injection layer, a hole transport layer, an electron transportlayer, and an electron injection layer.

Next, a metal material is deposited on the substrate 610 to form asecond electrode 740. The second electrode 740 may be formed ofmagnesium (Mg), silver (Ag), aluminum (Al), calcium (Ca), or an alloythereof having a low line resistance and a low work function. Othermetal materials may be used for the second electrode 740.

In this way, the OLED display according to the second embodiment of theinvention is manufactured.

As described above, the OLED display according to the second embodimentof the invention may be manufactured using a total of five masksincluding the first to third masks and the first and second halftonemasks, as compared the related art OLED display manufactured using atotal of nine masks. Accordingly, the OLED display according to thesecond embodiment of the invention may reduce the use of four masks ascompared the related art OLED display. As a result, the manufacturingcost may be reduced, and the productivity and the manufacturing yieldmay be improved.

Although embodiments have been described with reference to a number ofillustrative embodiments thereof, it should be understood that numerousother modifications and embodiments can be devised by those skilled inthe art that will fall within the scope of the principles of thisdisclosure. More particularly, various variations and modifications arepossible in the component parts and/or arrangements of the subjectcombination arrangement within the scope of the disclosure, the drawingsand the appended claims. In addition to variations and modifications inthe component parts and/or arrangements, alternative uses will also beapparent to those skilled in the art.

What is claimed is:
 1. An organic light emitting diode (OLED) displaycomprising: a substrate; an active layer and a silicon patternpositioned on the substrate; a first insulating pattern positioned onthe active layer and a second insulating pattern positioned on thesilicon pattern; a capacitor lower electrode positioned on the secondinsulating pattern; a gate insulating layer positioned on the firstinsulating pattern and the capacitor lower electrode; a gate electrodepositioned on the gate insulating layer at a location corresponding tothe active layer; a capacitor upper electrode positioned on the gateinsulating layer at a location corresponding to the capacitor lowerelectrode; a first electrode positioned to be separated from the gateelectrode and the capacitor upper electrode; an interlayer insulatinglayer positioned on the gate electrode, the capacitor upper electrode,and the first electrode; a source electrode and a drain electrode, whichare positioned on the interlayer insulating layer and connected to theactive layer, one of the source electrode and the drain electrode beingconnected to the first electrode; a bank layer positioned on the sourceelectrode and the drain electrode, the bank layer exposing a portion ofthe first electrode; a spacer positioned on the bank layer; an organiclayer positioned on the exposed portion of the first electrode; and asecond electrode positioned on the organic layer.
 2. The OLED display ofclaim 1, wherein the gate electrode has a stack of a first metal oxidematerial and a first metal material, and the capacitor upper electrodehas a stack of a second metal oxide material and a second metalmaterial.
 3. The OLED display of claim 2, wherein the first metalmaterial is positioned on the first metal oxide material, and the secondmetal material is positioned on the second metal oxide material.
 4. TheOLED display of claim 1, wherein the first electrode has a stack of athird metal oxide material and a third metal material.
 5. The OLEDdisplay of claim 4, wherein the third metal material is positioned onthe third metal oxide material.
 6. The OLED display of claim 1, whereinthe spacer is formed of the same material as the bank layer.